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Plasma Chemistry III
other
Editor(s):
Stanislav Vepřek
,
Mundiyath Venugopalan
Publication date
(Print):
1980
Publisher:
Springer-Verlag
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Model Reduction of Parametrized Systems 2015
Author and book information
Book
ISBN (Print):
3-540-10166-7
Publication date (Print):
1980
DOI:
10.1007/BFb0048584
SO-VID:
4a749d45-b69f-4869-8d34-bb06f17beb02
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Book chapters
pp. 1
Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization
pp. 69
Elementary processes at solid surfaces immersed in low pressure plasmas
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