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Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
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Most cited references26
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{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Nicolas Ledermann, Paul Muralt, Jacek Baborowski … (2003)
- Record: found
- Abstract: not found
- Article: not found
Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films
Marc-Alexandre Dubois, Paul Muralt (1999)
- Record: found
- Abstract: not found
- Article: not found
The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin films
P.J. Moses, S. Trolier-McKinstry, J.F. Shepard (1998)