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Archaeology International
Architecture_MPS
Europe and the World: A law review
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History Education Research Journal
International Journal of Development Education and Global Learning
International Journal of Social Pedagogy
Jewish Historical Studies: A Journal of English-Speaking Jewry
Journal of Bentham Studies
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Research for All
The Journal of the Sylvia Townsend Warner Society
The London Journal of Canadian Studies
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Sputtering by Particle Bombardment III
Introduction
other
Author(s):
Rainer Behrisch
,
Klaus Wittmaack
Publication date
(Online):
July 1 2005
Publisher:
Springer Berlin Heidelberg
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An Introduction to SAXS
Most cited references
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Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Peter Sigmund
(1969)
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Theory of Auger Ejection of Electrons from Metals by Ions
Homer D. Hagstrum
(1954)
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II. The energy spectrum of ejected atoms during the high energy sputtering of gold
M Thompson
(2016)
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Author and book information
Book Chapter
Publication date (Print):
1991
Publication date (Online):
July 1 2005
Pages
: 1-13
DOI:
10.1007/3540534288_15
SO-VID:
43ad8ab9-8c86-4948-be7b-c9f35c3e8178
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Book chapters
pp. 1
Introduction
pp. 15
Angular, energy, and mass distribution of sputtered particles
pp. 91
Charged and excited states of sputtered atoms
pp. 161
Surface and depth analysis based on sputtering
pp. 257
Desorption of organic molecules from solid and liquid surfaces induced by particle impact
pp. 305
Production of microstructures by ion beam sputtering
pp. 339
Production of thin films by controlled deposition of sputtered material
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