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      Microfabrication and Nanomanufacturing

      edited-book
      CRC Press

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          978-0-8247-2431-3
          978-1-4200-2827-0
          November 10 2005
          November 25 2009
          10.1201/9781420028270
          89db064b-fd81-440c-b899-151659b1b1d0
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