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Microfabrication and Nanomanufacturing
edited-book
Editor(s):
Mark Jackson
Publication date
(Online):
November 25 2009
Publisher:
CRC Press
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Book
ISBN (Print):
978-0-8247-2431-3
ISBN (Electronic):
978-1-4200-2827-0
Publication date (Print):
November 10 2005
Publication date (Online):
November 25 2009
DOI:
10.1201/9781420028270
SO-VID:
89db064b-fd81-440c-b899-151659b1b1d0
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Book chapters
pp. 1
Micro- and Nanofabrication
pp. 33
Microfabrication Using X-Ray Lithography
pp. 59
Etching, Machining, and Molding High-Aspect Ratio Microstructures
pp. 87
The Size Effect in Micromachining
pp. 111
Mechanical Micromachining
pp. 143
Precision Microand Nanogrinding
pp. 187
CVD Diamond Technology for Microtools, NEMS, and MEMS Applications
pp. 221
Laser-Based Microand Nanofabrication
pp. 249
Pulsed Water Drop Micromachining
pp. 277
Diamond Nanogrinding
pp. 311
Nanometric Machining
pp. 339
Nanocrystalline Diamond
pp. 359
Commercialization Issues of Micro-Nano Technology
pp. 367
The Future of Micro- and Nanomanufacturing
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