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Synchrotron Radiation Applied to Biophysical and Biochemical Research
X-Ray Lithography and Microscopy
other
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Most cited references19
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Electron‐beam fabrication of 80‐Å metal structures
N. Wittels, W. W. Molzen, J. Cuomo … (1976)
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Phase zone plates for x rays and the extreme uv
Janos Kirz (1974)
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Fabrication techniques for surface-acoustic-wave and thin-film optical devices
H.I. Smith (1974)