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Microwave Discharges
Diagnostics of Microwave Discharges
other
Author(s):
H. Schlüter
Publication date
(Print):
1993
Publisher:
Springer US
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Kinetic theory of the plasma sheath transition in a weakly ionized plasma
K.‐U. Riemann
(1981)
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Modelling of a low-pressure plasma column sustained by a surface wave
C. M. Ferreira
(1983)
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Sensitive, Nonintrusive,In-SituMeasurement of Temporally and Spatially Resolved Plasma Electric Fields
Richard A. Gottscho
,
Cameron A. Moore
,
Glenn Davis
(1984)
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Author and book information
Book Chapter
Publication date (Print):
1993
Pages
: 225-245
DOI:
10.1007/978-1-4899-1130-8_15
SO-VID:
a9c65ff5-aef4-411d-b2f6-ca24f43e1809
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Book chapters
pp. 1
The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectives
pp. 25
Wave Propagation in Bounded Plasmas
pp. 45
Microwave Discharges : Structures and Stability
pp. 65
Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguides
pp. 75
Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressure
pp. 85
Strongly Damped Surface Waves in Plasmas
pp. 95
Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Field
pp. 105
Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Waves
pp. 117
Surface-Wave Plasma Sources
pp. 141
Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmas
pp. 161
ECR Plasma Sources
pp. 181
Distributed ECR: Concept, Performances and Perspectives
pp. 205
Large Area Planar Microwave Plasmas
pp. 215
Fabry-Perot-Type Microwave Resonator
pp. 225
Diagnostics of Microwave Discharges
pp. 247
Thermal Discharges: Experiments and Diagnostics
pp. 269
Optical Diagnostics in Radiofrequency Glow and Afterglow
pp. 279
Optical Diagnostics for High Electron Density Plasmas
pp. 291
Use of Emissive Probes in HF Plasmas
pp. 303
Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmas
pp. 313
Kinetic Modeling of Microwave Discharges
pp. 339
Collision Dominated Electron Kinetics in Low and High Frequency Fields
pp. 359
Power Deposition in Low Pressure, Capacitively Coupled RF Discharges
pp. 379
Time Dependent Electron Energy Distribution Functions in Molecular Gases
pp. 395
Excitation Equilibria in Plasmas; A Classification
pp. 407
Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundaries
pp. 427
Applications of Microwave Discharges to High-Power Light Sources
pp. 445
Semiconductor Processing Applications of Microwave Plasmas
pp. 465
Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmas
pp. 481
Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Deposition
pp. 491
Surface Wave Plasmas in O2-N2 Mixtures as Active Species Sources for Surface Treatments
pp. 503
Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interaction
pp. 509
Applications of Microwave Discharges to Elemental Analysis
pp. 531
Microwave Methods for the Fabrication of Optical Fibres
pp. 541
Diamond Films: Procedures and Parameters
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