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ISBN: 3-540-23438-1

Publication date (Print): 2006

DOI: 10.1007/3-540-29708-1

SO-VID: 8eb46e0d-02d8-4328-be16-db8520e5cc9b

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Cited by 2

High-NA Interferometrical Stylus for Free Form Surface Measurement in Optical and Automotive Industry
Authors: Matthias Fleischer, Gerald Franz, Pawel Drabarek
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Authors: Jörg Franke

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