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Optical constants from the far infrared to the x-ray region: Mg, Al, Cu, Ag, Au, Bi, C, and Al_2O_3

H.-J. Hagemann, W. Gudat, C. Kunz (1975)

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Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen

Hans Wolter (1952)

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Electron‐beam fabrication of 80‐Å metal structures

N. Wittels, W. W. Molzen, J. Cuomo … (1976)

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Publication date (Print): 1977

Publication date (Online): July 13 2005

Pages: 35-92

DOI: 10.1007/3-540-08462-2_9

SO-VID: 28321c8d-af1d-4adc-af8d-e07861aa7530

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Plasmonic Nanolithography: A Review
Authors: Hongxin Zhang, Yongqi Fu, Hua Liu …
Fabrication Techniques for Submicron Devices
Authors: David Ferry, Robert Grondin
X-Ray Lithography and Microscopy
Authors: Eberhard Spiller, Ralph Feder, David A Sayre

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X-ray lithography

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Most cited references 105

Optical constants from the far infrared to the x-ray region: Mg, Al, Cu, Ag, Au, Bi, C, and Al_2O_3

Spiegelsysteme streifenden Einfalls als abbildende Optiken für Röntgenstrahlen

Electron‐beam fabrication of 80‐Å metal structures

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